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- In-Situ Real-Time Process Monitoring and Endpoint Detection
An intuitive interface enables the user to rapidly design and optimize endpoint recipes The software calculates etch deposition rate and depth in real-time and features powerful endpoint algorithms that can be easily extended from simple to highly customized applications
- Laser Interferometry: A Comprehensive Guide
Laser interferometry is a powerful measurement technique that offers unparalleled precision in surface examination It combines the advantages of traditional interferometry and confocal microscopy, making it a valuable tool in various industries such as microelectronics and precision optics By using a broadband light source and a Michelson interferometer setup, laser interferometry allows for
- A Tutorial on Laser Interferometry for Precision Measurements
Russell Loughridge* Abstract—Laser interferometers have found wide usage in a variety of precision measurement applications The ability to gain precise position information with minimal change to the dynamics of the device being measured has a large set of advantages This allows interferometer systems to be used in feedback loops for precision systems This paper presents a tutorial on
- Interferometry explained - Renishaw
Laser interferometry is a well-established method for measuring distances with great accuracy In order to generate an interference pattern with high precision (distinct fringes), it is very important to have a single highly stable wavelength source, which is achieved using the XL-80 laser
- ANALYSIS OF LASER INTERFEROMETER MEASUREMENT UNCERTAINTY BY SIMULATING . . .
The laser frequency is calibrated by comparison with primary standard laser [5-7], while whole instrumental system can be checked by means of comparison measurement with a reference laser interferometer, presented in this article Figure 1: A configuration of interferometer system: a) Michelson’s interferometer, b) Heterodyne interferometer [3]
- Laser Interferometry | EBSCO Research Starters
Summary Laser interferometry includes many different measurement methods that are all based on the unique interference properties of laser lights These techniques are used to measure distance, velocity, vibration, and surface roughness in industry, military, and scientific research Definition and Basic Principles Laser interferometry is a technique that is used to make extremely precise
- High precision measurements using Laser Interferometer - Roots Metrology
Laser interferometer is a sophisticated optical instrument used for precise measurements of displacement, distance Here’s a detailed overview of its purpose and applications: Purpose of a Laser Interferometer 1 Precision Measurement: Displacement: Laser interferometers measure tiny changes in position with high accuracy
- JobinYvonIREPD - horiba-endpoint-semi-mems-fpd. com
The second is to use optical emission spectroscopy (OES) which is a secondary measurement of the process and requires a large open area, fast etch rate, and a detectable emission line from the etch products The third is laser interferometry, a primary measurement, based on light interference of reflected beams from several layers in the stack
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